Waferpedia

Comparison ledger

1070versusPrecio

Signatone 1070, Tokyo Electron Precio, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1070Signatone
PrecioTokyo Electron
OEMSignatoneTokyo Electron
CategoryTest & ProbeTest & Probe
Wafer size—Single FOUP Wafer Loader (Right)
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySignatone 1070Tokyo Electron Precio
Cited variants—
Specifications
MakeSignatone[2]—
Model1070[2]—
Tri-temp Chuck—-25C to 150C[3]
Configuration—Dual Load Port[3]
Wafer size—Single FOUP Wafer Loader (Right)[4]
Wafer size (mm)—200, 300[1]
XY probing accuracy (μm)—±1.8[1]
Z probing accuracy (μm)—±5.0[1]
Probing force (kg)—200/300*[1]
Optical system—ASU/BCU-Ⅱ[1]
Operation system—Windows+VME[1]
Stage technology—Ball screw[1]
Product type—Fully automatic wafer-probing platform[1]
Application—Wafer testing[1]
Chuck—Nickel hot & cold chuck unit[4]
Loader—Single FOUP Wafer Loader (Right)[4]
Tester interface—GPIB tester interface[4]
Chiller—C355 / RD9915 chiller[4]
Vintage—~2007[4]
XY accuracy—±1.8 µm[1]
Z accuracy—5 µm[1]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]tel.comtel.com
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]inventory listing