Waferpedia

Comparison ledger

Storm 300 Wafer Cleaningversus1300 Series Safety

Semitool Storm 300 Wafer Cleaning, Thermo Fisher 1300 Series Safety, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1300 Series SafetyThermo Fisher
OEMSemitoolThermo Fisher
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2026 Third-party support only
Control system——
Generation——
FamilySemitool Storm 300 Wafer CleaningThermo Fisher 1300
Specifications
CategoryWet Processing / Clean[1]—
OEMSemitool[2]—
ModelStorm 300[2]—
Wafer size12 inch[2]—
Vintage2010[2]—
Configuration—Class II[3]
Cabinet type—Class II, Type A2 biological safety cabinet[4]
Airflow compensation—SmartFlow airflow compensation system[4]
Motors—Dual DC motors[4]
Front window design—SmartClean front window design[4]
Control panel—Intuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[4]
UV light—Programmable UV light[4]
SmartPort—SmartPort convenience for routing tubing and cables through the side walls[4]
Available widths—3-foot, 4-foot, 5-foot, and 6-foot sizes[4]
Front opening choices—8-inch or 10-inch front opening[4]
Filter specification—H14 HEPA filters, EN 1822, 99.995% @ MPPS[5]
Certification—NSF/ANSI 49, UL, CE[5]
Service valves—Up to 6 total, 3 on each side wall[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]thermofisher.comthermofisher.com
  5. [5]documents.thermofisher.comdocuments.thermofisher.com