Comparison ledger
Semitool 421 Scepter Spray Solvent, Thermo Fisher 1300 Series Safety, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 421 Scepter Spray SolventSemitool | 1300 Series SafetyThermo Fisher |
|---|---|---|
| OEM | Semitool | Thermo Fisher |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | Batch Solvent Processor for Wafer Cleaning | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2026 Third-party support only |
| Control system | — | — |
| Generation | — | — |
| Family | Semitool 421 | Thermo Fisher 1300 |
| Cited variants |
| — |
| Specifications | ||
| Wafer size | Batch Solvent Processor for Wafer Cleaning[2] | — |
| Configuration | Max Substrate Size of 8”/200mm[2] | Class II[5] |
| Maximum substrate size | 200 mm (8 inch)[2] | — |
| Batch capacity | Up to 50 wafers[3] | — |
| Chamber type | Single chamber[3] | — |
| Automation level | Semi-automated[3] | — |
| Number of tanks | 4 stainless steel (2 heated, 2 ambient)[4] | — |
| Process applications | Polymer removal, resist stripping, wafer cleaning, metal lift-off[4] | — |
| OEM model number | SST-421[4] | — |
| Also known as | Scepter Spray Solvent Tool (SST)[2] | — |
| Maximum wafer count per batch | 50 wafers[2] | — |
| Number of heated tanks | 2[4] | — |
| Rotor included | 1 rotor (select size at time of order)[4] | — |
| Touch screen | Class 1 Touch Screen Monitor[1] | — |
| Pumps | Pneumatic pumps, Trebor 610 back[1] | — |
| Cabinet type | — | Class II, Type A2 biological safety cabinet[6] |
| Airflow compensation | — | SmartFlow airflow compensation system[6] |
| Motors | — | Dual DC motors[6] |
| Front window design | — | SmartClean front window design[6] |
| Control panel | — | Intuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[6] |
| UV light | — | Programmable UV light[6] |
| SmartPort | — | SmartPort convenience for routing tubing and cables through the side walls[6] |
| Available widths | — | 3-foot, 4-foot, 5-foot, and 6-foot sizes[6] |
| Front opening choices | — | 8-inch or 10-inch front opening[6] |
| Filter specification | — | H14 HEPA filters, EN 1822, 99.995% @ MPPS[7] |
| Certification | — | NSF/ANSI 49, UL, CE[7] |
| Service valves | — | Up to 6 total, 3 on each side wall[7] |
Plan your fab
Building a Wet Processing / Clean process? Get a complete equipment list.
Open the fab equipment planner →