Comparison ledger
Semitool 003163-000 SRD, Veeco Waferstorm M 3305 Lift Off, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 003163-000 SRDSemitool | |
|---|---|---|
| OEM | Semitool | Veeco |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | Robotic Wafer Handler: |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Semitool 003163-000 SRD | Veeco Waferstorm |
| Cited variants | — |
|
| Specifications | ||
| Make | Semitool[2] | — |
| Model | 003163-000[2] | — |
| Equipment type | Spin Rinse Dryer (SRD)[2] | — |
| Asset # | 139375[2] | — |
| Last Confirm Date | September 03, 2025[2] | — |
| Configuration | — | 300 Series[1] |
| Spin Chuck | — | 150 mm (Centrifugal Edge Grip)[1] |
| Voltage | — | 415 VAC[3] |
| Frequency | — | 50 Hz[3] |
| Phase | — | 3 Phase[3] |
| Wafer Size | — | 150 mm[1] |
| Power Requirements (Listing 1) | — | 415 VAC, 50 Hz, 3 Phase, 30 A[4] |
| Power Requirements (Listing 2) | — | 415 VAC, 50 Hz, 3 Phase[3] |
| Vintage (Listing 2) | — | 2010[3] |
| Vintage (Listing 3) | — | 2010[4] |
| Spin Chuck Type | — | 150 mm Centrifugal Edge Grip[1] |
| Cassette Loading | — | Qty 2 Horizontal Cassette Loading with 2 MCPs (8 total 150 mm Cassettes)[1] |
| Operating System | — | Windows 10[1] |
| SECS/GEM | — | Yes[1] |
| ESD Configuration | — | UPLA Filter with Air Ionizer Bar (Standard ESD Configuration)[1] |
| Fire Suppression | — | CO2 Fire Suppression System for 180" Frame: IR Detector, 120 Degrees Viewing Angle & Linear Heat Detector Wire[1] |
| Wafer size | — | Robotic Wafer Handler:[1] |
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