Waferpedia

Comparison ledger

003163-000 SRDversusStorm 300 Wafer Cleaning

Semitool 003163-000 SRD, Semitool Storm 300 Wafer Cleaning, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMSemitoolSemitool
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySemitool 003163-000 SRDSemitool Storm 300 Wafer Cleaning
Specifications
MakeSemitool[1]—
Model003163-000[1]Storm 300[3]
Equipment typeSpin Rinse Dryer (SRD)[1]—
Asset #139375[1]—
Last Confirm DateSeptember 03, 2025[1]—
Category—Wet Processing / Clean[2]
OEM—Semitool[3]
Wafer size—12 inch[3]
Vintage—2010[3]

Plan your fab

Building a Wet Processing / Clean process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing