Waferpedia

Comparison ledger

SS W 80 A-ARversus1300 Series Safety

SCREEN SS W 80 A-AR, Thermo Fisher 1300 Series Safety, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1300 Series SafetyThermo Fisher
OEMSCREENThermo Fisher
CategoryWet Processing / CleanWet Processing / Clean
Wafer size200mm—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2026 Third-party support only
Control system——
Generation——
FamilySCREEN SS W 80Thermo Fisher 1300
Specifications
ConfigurationFully upgraded DNS SS-W80A-AR:[1]Class II[2]
Wafer size200mm Notch Standard Silicon Wafer Substrate (Left to Right wafer flow)[1]—
MakeSCREEN / DNS[1]—
ModelSS W 80 A-AR[1]—
Wafer Sizes8 inch[1]—
Scrubbing Units2 front, 2 back side[1]—
Reverse Units2[1]—
DI Water RinseIncluded[1]—
Back RinseIncluded[1]—
Brush RinseIncluded[1]—
Nano DIW with N2Included[1]—
Wafer substrate200mm notch standard silicon wafer substrate[1]—
CommunicationSECS II or GEM included[1]—
Wafer log trackingReal time wafer log tracking system per each wafer[1]—
Auto back-up systemIncluded[1]—
Recipe processingWafer level recipe processing; multi recipe/job processing per cassette (max 25 recipes per 1 cassette)[1]—
Automatic wafer collection featureIncluded[1]—
Auto teaching featureIncluded[1]—
Cabinet type—Class II, Type A2 biological safety cabinet[3]
Airflow compensation—SmartFlow airflow compensation system[3]
Motors—Dual DC motors[3]
Front window design—SmartClean front window design[3]
Control panel—Intuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[3]
UV light—Programmable UV light[3]
SmartPort—SmartPort convenience for routing tubing and cables through the side walls[3]
Available widths—3-foot, 4-foot, 5-foot, and 6-foot sizes[3]
Front opening choices—8-inch or 10-inch front opening[3]
Filter specification—H14 HEPA filters, EN 1822, 99.995% @ MPPS[4]
Certification—NSF/ANSI 49, UL, CE[4]
Service valves—Up to 6 total, 3 on each side wall[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]thermofisher.comthermofisher.com
  4. [4]documents.thermofisher.comdocuments.thermofisher.com