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Comparison ledger

RR 700 L 150 Z 30versus100R16

Rorze RR 700 L 150 Z 30, Strasbaugh 100R16, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
100R16Strasbaugh
OEMRorzeStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyRorze RR 700 L 150 Z 30Strasbaugh 100R16
Cited variants
  • RR700L150-Z30-01[1]
—
Specifications
ConfigurationSingle Arm, compatible with AMAT Mirra Mesa CMP[2]—
Wafer size6 inch[2]—
Wafer size (alternate variant)200mm[1]—
Arm configurationSingle arm[2]—
Compatible systemsAMAT Mirra Mesa CMP[2]—
Application typeSMIF robot[1]—
Wafer size (base model)6 inch[2]—
Robot typeDry robot[3]—
ManufacturerRorze[2]—
ModelRR 700 L 150 Z 30[2]—
CategoryCMP[4]—
Wafer handling size200 mm[4]—
CompatibilityAMAT Mirra Mesa CMP[2]—
type—1 spindle grinder/polisher[5]
drive system—DC drive system with 2 motors[5]
spindle RPM—1-180 RPM[5]
eccentric RPM—1-90 RPM[5]
controls—digital timer; air down switch; spindle and eccentric speed dials; air regulators[5]
capacity—16 inches[5]
spindle size—1-8 TPI[5]
overall dimensions—28 inches x 36 inches x 48 inches[5]
weight—500 lbs[5]
origin—made in the USA[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]tarasemi.comtarasemi.com
  2. [2]inventory listing
  3. [3]shop.entrepix.comshop.entrepix.com
  4. [4]waferpedia.comwaferpedia.com
  5. [5]excelltechnology.comexcelltechnology.com