Waferpedia

Comparison ledger

Servo RS 5400versus100R16

PR Hoffman Servo RS 5400, Strasbaugh 100R16, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Servo RS 5400PR Hoffman
100R16Strasbaugh
OEMPR HoffmanStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyPR Hoffman Servo RS 5400Strasbaugh 100R16
Specifications
type—1 spindle grinder/polisher[1]
drive system—DC drive system with 2 motors[1]
spindle RPM—1-180 RPM[1]
eccentric RPM—1-90 RPM[1]
controls—digital timer; air down switch; spindle and eccentric speed dials; air regulators[1]
capacity—16 inches[1]
spindle size—1-8 TPI[1]
overall dimensions—28 inches x 36 inches x 48 inches[1]
weight—500 lbs[1]
origin—made in the USA[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]excelltechnology.comexcelltechnology.com