Comparison ledger
Plasma-Therm 770, Tegal 915, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 770Plasma-Therm | 915Tegal |
|---|---|---|
| OEM | Plasma-Therm | Tegal |
| Category | Etch | Etch |
| Wafer size | 100mm | 100mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 1984– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Plasma-Therm 770 | Tegal 915 |
| Specifications | ||
| Manufacturer | Plasmatherm (Unaxis)[1] | — |
| Model | Plasma-Therm 770 SLR series[1] | — |
| Tool type | Dry Etch[1] | — |
| System type | Fluorine-based ICP etcher with loadlock[1] | — |
| Plasma source | Inductively Coupled Plasma (ICP) coil[1] | — |
| Substrate bias | Capacitively coupled substrate RF supply[1] | — |
| ICP coil power | 1000 W at 2 MHz[1] | — |
| Substrate bias power | 500 W at 13.56 MHz[1] | — |
| Available gases | C4F8, SF6, O2, Ar, N2, CHF3, CF4[1] | — |
| Backside cooling | Helium backside cooling[1] | — |
| Chuck temperature | 10°C standard[1] | — |
| Wafer handling | Single 100 mm / 4-inch wafer handling with physical topside clamp contacting the outer 5 mm of the wafer[1] | — |
| Control system | Windows-based computer control of process and wafer handling[1] | — |
| Endpoint monitoring | In-situ laser monitor with camera and simulation software[1] | — |
| Number of MFC gas controllers | 8[2] | — |
| Gases (chlorine configuration) | N₂, O₂, CHF₃, AR, CH₄, CL₂, BCL₃, CF₄[2] | — |
| Wafer size range (with appropriate kit) | 2" to 8"[2] | — |
| Gases (previous usage, chlorine configuration) | N₂, O₂, He, CHF₃, Cl₂, BCl₃[3] | — |
| Batch capacity | — | Six cassettes of 100 mm wafers (150 pcs.) and four cassettes of 125 mm and 150 mm wafers (100 pcs.)[4] |
| Feed gases | — | Two independent feed gases[4] |
| Reaction chamber temperature control | — | Up to 100 degrees C[4] |
| Type | — | Plasma barrel etcher[4] |
| Wafer size | — | 100mm[5] |
| Production start | — | 1984[5] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →