Waferpedia

Comparison ledger

DSS 200 Synergy Brushversus11600 SRD

Ontrak DSS 200 Synergy Brush, Semitool 11600 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
11600 SRDSemitool
OEMOntrakSemitool
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyOntrak DSS 200 Synergy BrushSemitool 11600 SRD
Specifications
CategoryWet Processing / Clean[1]—
TypePost-CMP wafer cleaner[2]—
Cleaning methodBrush scrub[2]—
Configured substrate size100-200mm substrate[2]—
Vintage1998[3]—
Configuration—Ceramic[4]
Manufacturer—Semitool[4]
Model—11600 SRD[4]
Equipment type—Spin Rinse Dryer[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]entrepix.comentrepix.com
  3. [3]Equipment inventory listing
  4. [4]inventory listing