Comparison ledger
Nikon NSR-1505G4, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NSR-1505G4Nikon | 1000 FamilyUltratech |
|---|---|---|
| OEM | Nikon | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | 4" | — |
| Process node | better than 750 nm resolution; better than 150 nm alignment | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | g-line | — |
| Family | Nikon NSR-1505G4 | Ultratech 1000 Family |
| Specifications | ||
| Type | Wafer stepper[1] | — |
| Reduction | 5x reduction[1] | — |
| Reticle size | 5" reticle[1] | — |
| Wafer size | 4" wafers[1] | — |
| Exposure source | g-line UV[1] | — |
| Resolution | better than 750 nm[1] | — |
| Alignment | better than 150 nm[1] | — |
| Reduction factor | 5x[1] | — |
| Alignment accuracy | better than 150 nm[1] | — |
| Tool type | — | Photolithography step-and-repeat 1X stepper[2] |
| Optical design | — | Wynne Dyson[2] |
| Magnification | — | 1X[2] |
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