Comparison ledger
Meyer Burger AK 800, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | AK 800Meyer Burger | 1512eTegal |
|---|---|---|
| OEM | Meyer Burger | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Meyer Burger AK 800 | Tegal 1512e |
| Specifications | ||
| 1. Magnetron head | Muegge 3kW | — |
| 8. Gas box | BCl3, Cl2, C4F8, CF4, CF3H, | — |
| 19. Dry pump | Ebara EV-S100P | — |
| 20. Dry Pump | Ebara EV-M202N- | — |
| Vintage | 2015 | — |
| Etch/Asher Vintage | 2015 | — |
| Tool type | — | Industrial RIE plasma etcher system[1] |
| Stated configuration | — | With modules assembly for CI-4222[1] |
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