Comparison ledger
Logitech EP1, Strasbaugh 100R16, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | EP1Logitech | 100R16Strasbaugh |
|---|---|---|
| OEM | Logitech | Strasbaugh |
| Category | CMP | CMP |
| Wafer size | 100mm | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Logitech EP1 | Strasbaugh 100R16 |
| Specifications | ||
| Product family | EP Polishing Pads and Cloths[1] | — |
| Application type | Chemical Mechanical Polishing (CMP)[1] | — |
| Suitable applications | oxide, nitride and copper[1] | — |
| Type | Chemical Mechanical Polishing (CMP) cloths and pads[1] | — |
| Suitable materials | Oxide, nitride and copper[1] | — |
| Product type | Chemical Mechanical Polishing (CMP) polishing cloths and pads[1] | — |
| Applications | oxide, nitride, and copper[1] | — |
| Associated wafer process capacity | up to 100mm/4"[2] | — |
| type | — | 1 spindle grinder/polisher[3] |
| drive system | — | DC drive system with 2 motors[3] |
| spindle RPM | — | 1-180 RPM[3] |
| eccentric RPM | — | 1-90 RPM[3] |
| controls | — | digital timer; air down switch; spindle and eccentric speed dials; air regulators[3] |
| capacity | — | 16 inches[3] |
| spindle size | — | 1-8 TPI[3] |
| overall dimensions | — | 28 inches x 36 inches x 48 inches[3] |
| weight | — | 500 lbs[3] |
| origin | — | made in the USA[3] |