Comparison ledger
Laurell Lz-23 B, Laurell WS-650-23 B, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Lz-23 BLaurell | WS-650-23 BLaurell |
|---|---|---|
| OEM | Laurell | Laurell |
| Category | Resist Processing | Resist Processing |
| Wafer size | 150mm | 150mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Laurell Lz-23 B | Laurell WS-650-23 B |
| Specifications | ||
| Series | 650-series[1] | — |
| Max. Substrate Size | Ø150mm (5" × 5")[1] | ø 150mm (5" x 5")[1] |
| Max. RPM | 12000 rpm[1] | 12000 rpm[1] |
| Mounting Options | Tabletop, In-Deck, On-deck[1] | Tabletop, In-Deck, On-deck[1] |
| Type | — | Spin Coater[1] |
| Controller | — | 650-series[1] |
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