Waferpedia

Comparison ledger

72versusAS 2000

Lapmaster 72, SCREEN AS 2000, side by side. Every value shown is drawn from the cited encyclopedia entries.

Documented as functional equivalents— Same function class: CMP, null[1]
Side-by-side comparison of selected equipment models
Attribute
72Lapmaster
AS 2000SCREEN
OEMLapmasterSCREEN
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 72SCREEN AS 2000
Cited variants
  • Model 72 Open Face Flat Polishing Machine[2]
  • Model 72 Polisher[3]
  • 72" Lapmaster, Open-Face, (4) 27" ID Rings, 5-32 RPM, 25HP, Slurry System, 2001[1]
  • Open Face (OF)[4]
  • Pneumatic Lift (PL)[4]
  • Model 72 Open Face[4]
  • Model 72 Pneumatic Lift[2]
—
Specifications
Configuration27" ID Rings[3]Dual brush and top side brush chambers, spin dry[5]
Voltage480 V[3]—
Plate Diameter72 inches (1829 mm)[4]—
Number of Conditioning Rings4[2]—
Ring Inside Diameter27.25 inches (692 mm)[4]—
Standard RPM30[4]—
RPM Range (Variable Speed Drive)5–32[4]—
Drive Motor (Lapper)20 HP / 15 kW[4]—
Drive Motor (alternate listing)25 HP[1]—
Working Height36 inches (914 mm)[4]—
Dimensions (Open Face)100 inches x 110 inches x 63 inches (2540 mm x 2794 mm x 1600 mm)[4]—
Dimensions (Pneumatic Lift)124 inches x 110 inches x 108 inches (3150 mm x 2794 mm x 2743 mm)[4]—
Est. Shipping Weight (Open Face)15,000 lbs (6804 kg)[4]—
Est. Shipping Weight (Pneumatic Lift)20,000 lbs (9072 kg)[4]—
Ring Height4.0 inches[1]—
Plate Thickness1-5/8 inches[1]—
Model72[3]—
Machine typePolisher[3]—
Plate diameter72 in[4]—
Conditioning rings4[2]—
Ring ID27.25 in[4]—
Ring size27" ID rings[3]—
Speed range5-32 RPM[3]—
RPM range with variable speed drive5-32[4]—
Drive motor25 HP[3]—
VersionOpen Face[2]—
Overall dimensions, Open Face100 in x 110 in x 63 in H[4]—
Weight, Open Face15,000 lbs[4]—
Serial number7200010[1]—
Year stated in source2001[1]—
Gas—1:100 DHF, 1:100 NH4OH[5]
OS—Windows NT[5]
Power—0.750KVA transformer[6]
Missing—HLS cards / condition not well[6]
Wafer Size—8 inch[7]
Brush Chambers—Dual brush and top side brush chambers[5]
Spin Dry—Yes[5]
Process Gases—1:100 DHF, 1:100 NH4OH[5]
Operating System—Windows NT[5]
Vintage Year (example unit)—1998[5]
Vintage Year (another unit)—1999[6]

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Sources (7)Every fact above is drawn from these public sources
  1. [1]libertymachinery.comlibertymachinery.com
  2. [2]lapmaster-wolters.co.uklapmaster-wolters.co.uk
  3. [3]Equipment inventory listing
  4. [4]web.archive.orgweb.archive.org
  5. [5]inventory listing
  6. [6]inventory listing
  7. [7]Equipment inventory listing