Waferpedia

Comparison ledger

120 Continuousversus6 DS SP

Lapmaster 120 Continuous, Strasbaugh 6 DS SP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
6 DS SPStrasbaugh
OEMLapmasterStrasbaugh
CategoryCMPCMP
Wafer size—Single Wafer SiC Substrate
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 120 ContinuousStrasbaugh 6 DS SP
Specifications
Configuration—Multi Process[1]
Voltage—208 V, 3 Phase, 60 Hz[2]
Full Load—60 A[2]
Motor—36 A[2]
Interrupting Capacity—10,000 A[2]
Wafer size—Single Wafer SiC Substrate[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing