Waferpedia

Comparison ledger

12 Lapperversus108T

Lapmaster 12 Lapper, PR Hoffman 108T, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
12 LapperLapmaster
108TPR Hoffman
OEMLapmasterPR Hoffman
CategoryCMPCMP
Wafer size—up to 12 in wafers
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—PR Hoffman 108T
Specifications
Outside plate diameter12 inches[1]—
Lapping Speed Range0 to 60 rpm[2]—
Wafer Size Compatibility4 inches or smaller[1]—
Input Voltage110 V[1]—
Frequency60 Hz[1]—
Phase1[1]—
Number of Rings3[1]—
Number of Weights3[1]—
Includes Slurry SystemYes[1]—
Includes TimerYes[1]—
carrier type listing—108T 9B - S/F / Lapmaster LSP-9 / etc.[3]
machine class—for double-sided planetary lapping & polishing machines[3]
wafer sizes stated on insert-carrier page—3 in, 4 in, 5 in, 6 in, 8 in, and 12 in wafers[3]
maximum carrier diameter stated on insert-carrier page—up to 33 in diameter[3]
maximum carrier diameter stated on lapping-carrier page—up to 48 in diameter[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]jmind.comjmind.com
  2. [2]etd.ohiolink.eduetd.ohiolink.edu
  3. [3]web.archive.orgweb.archive.org
  4. [4]web.archive.orgweb.archive.org