Comparison ledger
Lam Research SEZ 203 Spin Processor /, Oxford Instruments 100 ICP Fluorine, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SEZ 203 Spin Processor /Lam Research | 100 ICP FluorineOxford Instruments |
|---|---|---|
| OEM | Lam Research | Oxford Instruments |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lam Research SEZ 203 Spin Processor / | Oxford Instruments 100 ICP Fluorine |
| Specifications | ||
| Category | Etch[1] | — |
| Wafer size | 8 inch[2] | 4 inch, 6 inch, 8 inch (with clamp change)[4] |
| Wafer handling | Bernoulli wafer handling, Bernoulli chuck, Bernoulli grippers[3] | — |
| Open cassettes | Two open cassettes[3] | — |
| Chemical cabinets | 3 chemical cabinets (CDS)[3] | — |
| Etch Gases | — | SF6, CF4, O2, Ar, N2, CHF3, C4F8[4] |
| Cryo DRIE etch rate | — | up to 5 µm/min[4] |
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