Comparison ledger
KLA eDR 5200 +, KLA eDR 5210 DR-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | eDR 5200 +KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA eDR | KLA eDR |
| Cited variants |
| — |
| Specifications | ||
| Configuration | Parts Machine[2] | 2 Load Port (Brooks FixLoad)[5] |
| Tool type | defect review scanning electron microscope (DR-SEM)[3] | Defect review scanning electron microscope[5] |
| Category | Metrology & Inspection[4] | Metrology & Inspection[6] |
| Version | 300 mm[1] | — |
| Technology summary | High resolution imaging for classification of less than 50nm defects[1] | — |
| EDX capability | defects less than 100nm in diameter[1] | — |
| Wafer size | — | 12 inch (300 mm)[6] |
| Robot & Aligner | — | Brooks[5] |
| TMP | — | Edward[5] |
| Ion pump | — | Varian[5] |
| Vintage | — | 2010[6] |
| Wafer handling | — | Robot & Aligner (Brooks)[5] |
| Vacuum & pumping | — | TMP (Edward); Ion pump (Varian)[5] |
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