Comparison ledger
KLA Archer 10 XT Overlay, KLA P-2, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | P-2KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 200mm | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Archer | KLA P-2 |
| Specifications | ||
| Configuration | During refurbishment the loadports were replaced with the cassette loader that is shown in our video below[1] | — |
| Wafer size | 200mm dual port open wafer handler[1] | 200mm[5] |
| OEM | KLA[2] | KLA Tencor[3] |
| Model | Archer 10 XT Overlay[2] | P-2[3] |
| Category | Metrology & Inspection[2] | — |
| Description | 200mm overlay metrology system[2] | — |
| Software version | 5.6[1] | — |
| Wafer handler | 200mm dual port open wafer handler[1] | — |
| Chuck | 8" chuck[1] | — |
| Computer upgrade | XP computer upgrade[1] | — |
| Computer | KLASS RS2 computer[1] | — |
| Equipment type | — | Profilometer[3] |
| Sample table | — | 200 mm sample table with vacuum[4] |
| Measurement range | — | Measures steps from 100 Å to 300 µm[4] |
| Maximum sample thickness | — | 20 mm[4] |
| Minimum sample length | — | 25 mm[4] |
| Feature | — | 3D scan option[4] |
| 3D scan option | — | Yes[4] |
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