Comparison ledger
KLA .498 PSL Wafer, Thermo Fisher Scientific FEI Helios NanoLab 600 FIB-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Scientific FEI Helios NanoLab 600 FIB-SEMThermo Fisher | |
|---|---|---|
| OEM | KLA | Thermo Fisher |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .498 PSL Wafer | Thermo Fisher Scientific FEI Helios NanoLab 600 FIB-SEM |
| Specifications | ||
| Configuration | NIST Traceable[1] | Schottky FE mounted on the NG hot swap gun module[2] |
| NIST traceability | Yes[1] | — |
| Magnification | — | 69x-2300000x[2] |
| Stage Control | — | 5 axes motorized XYZRT 6” UHR stage with piezo control[2] |
| Beam - Schottky FE mounted on NG hot swap gun module | — | Schottky field emitter on NG hot swap gun module[2] |
| Beam - Gallium Liquid Metal | — | Gallium liquid metal ion source[2] |
| Beam - ELSTAR | — | ELSTAR[2] |
| Beam - Sidewinder | — | Sidewinder ion column[2] |
| Electron Column | — | Present[2] |
| ION Column | — | Present[2] |
| Resolution (Optional WD) - 15 kV | — | 0.9 nm @ 15 kV (optional WD), 1.4 nm @ 15 kV (optional WD)[2] |
| Resolution (Coincident WD) - 15 kV | — | 1 nm @ 15 kV[2] |
| Resolution (Coincident WD) - 5 kV | — | 1.6 nm @ 5 kV[2] |
| Resolution (Coincident WD) - kV (unspecified) | — | 2.5 nm @ (unspecified kV)[2] |
| Resolution (Coincident WD) - 30 kV | — | 5 nm @ 30 kV[2] |
| Stage Travel - X/Y | — | 150 mm[2] |
| Stage Travel - Z | — | 0-20 mm[2] |
| Stage Tilt | — | -10° to +60°[2] |
| Detector | — | Through-lens detection (TLD) for SE and BSE[2] |
| Omniprobe | — | Autoprobe 200[2] |
| STEM Detector | — | Retractable[2] |
| Plasma Cleaner | — | Ibss Group GV10x[2] |
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