Waferpedia

Comparison ledger

.498 PSL WaferversusEclipse LV 150

KLA .498 PSL Wafer, Nikon Eclipse LV 150, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLANikon
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferNikon Eclipse
Specifications
ConfigurationNIST Traceable[1]with accessories[2]
NIST traceabilityYes[1]—
Make—Nikon[2]
Model—Eclipse LV 150[2]
Type—Microscope[2]
OEM—Nikon[2]
Equipment type—Microscope[2]
Description—Microscope with accessories[2]
Context—Metrology and inspection microscopy[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]epfl.chepfl.ch