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.498 PSL WaferversusINS 3000 Macro Defect

KLA .498 PSL Wafer, KLA INS 3000 Macro Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Attribute
.498 PSL WaferKLA
INS 3000 Macro DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferKLA INS 3000
Specifications
ConfigurationNIST Traceable[1]No HDD[2]
NIST traceabilityYes[1]—
Loading Configuration—SMIF[2]
Number of Cassette Stations—1[2]
Leica INS Series—INS-3000[2]
Microscope Objective Sizes—NA[2]
Make—KLA / Leica[2]
Model—INS 3000[2]
Wafer size—8 inch[2]
Series—INS-3000[2]
Cassette stations—1[2]
DIC—No[2]
ADC—No[2]
OCR—No[2]
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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing