Waferpedia

Comparison ledger

.498 PSL WaferversusAltair 8900 Defect

KLA .498 PSL Wafer, KLA Altair 8900 Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferKLA Altair 8900 Defect
Specifications
ConfigurationNIST Traceable[1]For CMOS Image Sensor Applications[2]
NIST traceabilityYes[1]—
Module—Two Main Devices and a Set of UPS[2]
Wires—5, Phases: 3[2]
Max AIC—10,000[2]
Volts AC—208 V[2]
Amps—25[2]
Freq—50 / 60 Hz[2]
SCCR (A)—5,000[2]
Wafer size—8 inch[2]
Phases—3[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing