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.498 PSL WaferversusAlpha Step IQ Surface

KLA .498 PSL Wafer, KLA Alpha Step IQ Surface, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
.498 PSL WaferKLA
Alpha Step IQ SurfaceKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferKLA Alpha Step
Specifications
ConfigurationNIST Traceable[1]Windows XP[2]
NIST traceabilityYes[1]—
P/N—0051047-000[2]
Version—2.1.0[2]
Firmware version—1.34[2]
Part Number—0051047-000[2]
Operating System—Windows XP[2]
Software Version—2.1.0[2]
Type—Surface Profilometer[3]
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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]Equipment inventory listing