Comparison ledger
KLA .498 PSL Wafer, KLA Alpha Step D 500 Wafer Profiler Meter, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .498 PSL Wafer | KLA Alpha Step |
| Specifications | ||
| Configuration | NIST Traceable[1] | Missing Computer[2] |
| NIST traceability | Yes[1] | — |
| Instrument type | — | stylus profiler[3] |
| Measurement capability | — | 2D step height, roughness, bow, and stress[3] |
| Step height range | — | a few nanometers to 1200µm[3] |
| Stage | — | manual 140mm stage[3] |
| Optics | — | advanced optics with enhanced video controls[3] |
| Form factor | — | smallest compact size benchtop stylus profiler[3] |
| Wafer size | — | 8 inch[2] |
| Step height measurement range | — | a few nanometers up to 1200µm[3] |
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