Comparison ledger
KLA .496 PSL Wafer, Zygo Newview 7300 3D, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Newview 7300 3DZygo | |
|---|---|---|
| OEM | KLA | Zygo |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | Zygo Newview 7300 |
| Specifications | ||
| Configuration | NIST Traceable[1] | P/N 6301-0401-01[4] |
| Wafer size | 8 inch[1] | — |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | — |
| P/N | — | 6300-0593-01[3] |
| Motor Controller Box | — | 3 Axis NV Elect Assy Z[4] |
| Licenses | — | Metro Pro 9.1, Film Analysis[4] |
| Software Version | — | MetroPro 9.1.4[4] |
| Operating System | — | Windows 7 Pro[4] |
| Field Zoom Lens Sizes | — | 0.5X, 1X, 2X[4] |
| Objective Lens Included | — | 5X, 20X, 50X[4] |
| Measurement technique | — | White light interferometry (Coherence Scanning Interferometry, CSI)[5] |
| Profile height range | — | < 1 nm up to 10000 m[5] |
| Maximum substrate size | — | 8 inch[5] |
| Z resolution | — | Sub-angstrom[5] |
| Part number | — | 6300-0593-01[3] |
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