Comparison ledger
KLA .496 PSL Wafer, Zeiss Axio Imager M 2 m, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Axio Imager M 2 mZeiss | |
|---|---|---|
| OEM | KLA | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | Zeiss Axio |
| Specifications | ||
| Configuration | NIST Traceable[1] | Model 430014-9902-000[3] |
| Wafer size | 8 inch[1] | — |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | — |
| Imaging modes | — | Bright Field (reflected and transmitted light), Dark Field, Polarized Light (PLM) (reflected and transmitted light), Differential Interference Contrast (DIC)[4] |
| Objectives | — | 5x, 10x, 20x, 50x, and 100x Zeiss EC Epiplan-NEOFLUAR objectives (dark- and bright-field)[3] |
| Camera | — | Axiocam 712 mono or Axiocam 506 high resolution color camera[3] |
| Stage | — | Motorized xyz stage[3] |
| Autofocus | — | Laser autofocus system[3] |
| Software | — | Zeiss Zen Core, Zeiss Zen Pro[4] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →