Comparison ledger
KLA .496 PSL Wafer, Wyko NT9100, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NT9100Wyko | |
|---|---|---|
| OEM | KLA | Wyko |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | Wyko NT9100 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer size | 8 inch[1] | — |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | — |
| Equipment type | — | Microscopy/Surface Analysis[3] |
| Capabilities | — | Optical profiles[3] |
| Objectives | — | 5X, 20X, 100X[3] |
| Vertical resolution | — | 0.1 nm[3] |
| Measurement mode | — | Non-contact surface metrology[3] |
| Measurement capability | — | Non-contact, three-dimensional, topography and film thickness[5] |
| Field-of-view multipliers | — | 0.55X, 0.75X, 1X, 1.5X, 2X[5] |
| Measurement array | — | 640 x 480, non-interlaced; optional 1392 x 1040 camera[5] |
| Light source | — | Long-lifetime green and white LEDs[5] |
| Optical assembly | — | Dual LED illuminator; three-position FOV turret, closed-loop, 10 mm scan[5] |
| Stages | — | Automated 100 mm Z-axis; ±6° tip/tilt stage; 100 mm XY manual stage standard; 150 mm XY auto stage optional[5] |
| Vertical measurement | — | 0.1 nm to 10 mm standard range[5] |
| Repeatability | — | 0.05 nm[5] |
| Vertical scan speed | — | User-selectable up to 24 μm/sec[5] |
| Optical resolution | — | 0.49 μm minimum[5] |
| Certification | — | CE, NRTL[5] |
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