Comparison ledger
KLA .496 PSL Wafer, Nikon NEXIV VMZ R 3020, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NEXIV VMZ R 3020Nikon | |
|---|---|---|
| OEM | KLA | Nikon |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | Nikon NEXIV VMZ R 3020 |
| Cited variants | — | |
| Specifications | ||
| Configuration | NIST Traceable[2] | — |
| Wafer size | 8 inch[2] | — |
| Traceability | NIST Traceable[2] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[2] | — |
| Category | Metrology & Inspection[3] | — |
| Model | — | NEXIV VMZ R 3020[4] |
| Stroke | — | 300 x 200 x 200 mm[1] |
| Stroke (low magnification, type TZ) | — | 250 x 200 x 200 mm[1] |
| Minimum readout | — | 0.01 μm[1] |
| Maximum workpiece weight | — | 20 kg[1] |
| Measuring uncertainty EUX, MPE EUY, MPE | — | 1.2+4L/1000 μm[1] |
| Measuring uncertainty EUXY, MPE | — | 2+4L/1000 μm[1] |
| Z measurement uncertainty EUZ, MPE | — | 1.2+5L/1000 μm (with Laser AF)[1] |
| Camera | — | Black & white 1/3" CCD, color 1/3" CCD (option) for type 1, 2 and A only[1] |
| Power source | — | AC 100-240V 50/60Hz[1] |
| Power consumption | — | 5A-2.5A[1] |
| Dimensions (main unit & table) | — | 700 x 730 x 1795 mm[1] |
| Weight (main unit & table) | — | 245 kg[1] |
| Dimensions (controller) | — | 190 x 450 x 440 mm[1] |
| Weight (controller) | — | 15 kg[1] |
| Footprint | — | 2100 x 1100 mm[1] |
| Vintage | — | 2016[4] |
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