Waferpedia

Comparison ledger

.496 PSL WaferversusEclipse LV 150

KLA .496 PSL Wafer, Nikon Eclipse LV 150, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLANikon
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .496 PSL WaferNikon Eclipse
Specifications
ConfigurationNIST Traceable[1]with accessories[3]
Wafer size8 inch[1]—
TraceabilityNIST Traceable[1]—
Compatible systemsCapable on Surfscan 6xy0 and SP1[1]—
CategoryMetrology & Inspection[2]—
Make—Nikon[3]
Model—Eclipse LV 150[3]
Type—Microscope[3]
OEM—Nikon[3]
Equipment type—Microscope[3]
Description—Microscope with accessories[3]
Context—Metrology and inspection microscopy[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]epfl.chepfl.ch