Comparison ledger
KLA .496 PSL Wafer, Leica MZ75, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MZ75Leica | |
|---|---|---|
| OEM | KLA | Leica |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | Leica MZ75 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer size | 8 inch[1] | — |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | Inspection Microscope without Camera[3] |
| Model | — | Leica MZ75[3] |
| Location | — | Z07[3] |
| Option | — | Alignment microscope[3] |
| Type | — | Modular high-performance stereomicroscope[4] |
| Zoom range | — | 7.9:1[4] |
| Continuous zoom | — | 0.63× to 5×[4] |
| Description | — | For wafer, metal sections and thin sections[4] |
| Head | — | Binocular[5] |
| Eyepieces | — | Pair of 16x/14B[5] |
| Objective | — | Plan 1.0x objective[5] |
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