Comparison ledger
KLA 2367 Brightfield, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 2367 | KLA .496 PSL Wafer |
| Specifications | ||
| Power Requirements | 208 V, 16 A, 50 / 60 Hz, 3 Phase[1] | — |
| CE Marked | Yes[1] | — |
| Configuration | ORS Upgrade[1] | NIST Traceable[3] |
| OEM | KLA[1] | — |
| Model | 2367 Brightfield[1] | — |
| Category | Metrology & Inspection[2] | Metrology & Inspection[4] |
| Description | brightfield inspection system[2] | — |
| Wafer support | 200 mm cassettes[1] | — |
| Cassette HW | 25 cassette HW 200 mm[1] | — |
| Model support | GEM/SECS and HSMS[1] | — |
| Pixels enabled | .12, .62, .39[1] | — |
| Vintage | 2017[1] | — |
| Wafer size | — | 8 inch[3] |
| Traceability | — | NIST Traceable[3] |
| Compatible systems | — | Capable on Surfscan 6xy0 and SP1[3] |
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