Comparison ledger
KLA 2132 Brightfield, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 21xx | KLA .496 PSL Wafer |
| Specifications | ||
| Configuration | Main body only[1] | NIST Traceable[2] |
| OEM | KLA[1] | — |
| Model | 2132[1] | — |
| Wafer sizes | 6, 8 inch[1] | — |
| Vintage | 1995[1] | — |
| Wafer size | — | 8 inch[2] |
| Traceability | — | NIST Traceable[2] |
| Compatible systems | — | Capable on Surfscan 6xy0 and SP1[2] |
| Category | — | Metrology & Inspection[3] |
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