Comparison ledger
KLA .204 PSL Wafer, Nikon VM 150 CNC Video Measuring, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | Nikon |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Nikon VM 150 CNC Video Measuring |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[1] | — |
| Traceability | NIST[2] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[1] | — |
| Resolution | — | 0.001 mm[3] |
| Measuring Travel (X x Y) | — | 400 x 300 mm[3] |
| Magnification | — | 275x[3] |
| Operating Mode | — | Program controlled (automatic)[3] |
| Measurement Accuracy | — | 0.5 µm[3] |
| OEM | — | Nikon[3] |
| Model | — | VM 150[3] |
| Wafer size | — | 6 inch[3] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →