Comparison ledger
KLA .204 PSL Wafer, Micro-Vu Vertex 251 UC Automatic Vision Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | Micro-Vu |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Micro-Vu Vertex 251 UC Automatic Vision Measurement |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[1] | — |
| Traceability | NIST[2] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[1] | — |
| Model | — | 251UC[3] |
| Measurement Capacity | — | 250x160x160 mm[3] |
| Scale Resolution | — | 0.1 µm[3] |
| XY Accuracy | — | 2.0+L/250 µm[3] |
| Z Accuracy | — | 2.0+L/200 µm[3] |
| Stage Capacity | — | 10 kg[3] |
| Magnification | — | 36:1 Zoom Range, 15x-540x[3] |
| Power Requirements | — | 100-240 VAC[3] |
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