Comparison ledger
KLA .204 PSL Wafer, Malvern Panalytical X'Pert Pro, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | X'Pert ProMalvern Panalytical | |
|---|---|---|
| OEM | KLA | Malvern Panalytical |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Malvern Panalytical X'Pert Pro |
| Cited variants | — | |
| Specifications | ||
| Configuration | NIST Traceable[3] | Precision Powder[5] |
| Wafer Size | 8 inch[3] | — |
| Traceability | NIST[4] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[3] | — |
| NIST Traceable | Yes[3] | — |
| Type | — | PW3040/80[5] |
| Vintage | — | 2011[5] |
| X-ray source | — | Cu Kα radiation (Kα = 1.54187 Å)[1] |
| Goniometer radius | — | 240 mm[1] |
| Geometry | — | Bragg-Brentano (theta-theta system, vertical goniometer)[1] |
| Scan range of 2theta | — | 3°-150°[1] |
| Minimum-Maximum step size | — | 0.001°-1.27°[1] |
| Automatic sample changer | — | 15 samples[1] |
| Incident PreFIX Module | — | Fixed divergence slit holder[1] |
| Focusing X-ray Mirror | — | For Cu Kα[1] |
| Diffracted PreFIX Module | — | X’Celerator lineal Detector[1] |
| Available software | — | X’pert Data Collector, X’pert Data Viewer, X’pert Highscore, X’pert EasySAXS[1] |
| Detector | — | PIXcel Detector[2] |
| Temperature chamber | — | Anton Paar DHS 1100 Dome hot stage[2] |
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