Comparison ledger
KLA 1007, SUSS MicroTec PA 300 ProbeShield Probing, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | PA 300 ProbeShield ProbingSUSS MicroTec |
|---|---|---|
| OEM | KLA | SUSS MicroTec |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | SUSS MicroTec PA 300 |
| Specifications | ||
| Manufacturer | KLA[1] | — |
| Model | 1007[1] | — |
| Description | Wafer Prober[1] | — |
| Wafer size | 150 mm[1] | — |
| Convertible to 8 inch wafer size | Yes[1] | — |
| Vintage | 01.06.1995[1] | — |
| Make | KLA[2] | — |
| Equipment type | Prober[2] | — |
| Configuration | — | Velox 2.2.3.23[3] |
| Chuck | — | 12-inch nickel plated aluminum chuck[4] |
| Control unit | — | ATT M300 Control Unit[4] |
| Microscope | — | Cascade CMPS-888 Microscope[4] |
| Micropositioners | — | Suss PH150 Micropositioner 3ea[3] |
| Optics | — | 10X,2X Mitutoyo Plan Apo Objective 2ea[4] |
| Failure mode | — | Error57 No Motor Power (possible defective Motion Drive Board)[4] |
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