Comparison ledger
KLA 1007, Semics Opus 3 SH, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | Opus 3 SHSemics |
|---|---|---|
| OEM | KLA | Semics |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | Semics Opus |
| Cited variants | — |
|
| Specifications | ||
| Manufacturer | KLA[2] | SEMICS Inc[1] |
| Model | 1007[2] | — |
| Description | Wafer Prober[2] | — |
| Wafer size | 150 mm[2] | 6 Inches, 8 Inches, 12 Inches[1] |
| Convertible to 8 inch wafer size | Yes[2] | — |
| Vintage | 01.06.1995[2] | 2019[4] |
| Make | KLA[3] | — |
| Equipment type | Prober[3] | — |
| Configuration | — | Flat top plate for bigger test head application[4] |
| Full Load Current | — | 11 A[4] |
| Max Ampere Rating | — | 25 A[4] |
| Interruption Capacity | — | 10 kA[4] |
| Type | — | Automatic[1] |
| Accuracy | — | 1 µm[1] |
| Chuck size | — | 175 x 175 mm[1] |
| Operating temperature | — | -40 to 200 Degree C[1] |
| Overall dimensions | — | 1490 x 1680 x 960 mm[1] |
| Probing force | — | 450 kgf[1] |
| Part number | — | OPUS3 SH[1] |
| Voltage | — | 200~240 V[4] |
| Frequency | — | 50/60 Hz[4] |
| Chuck type | — | 12 inch nickel hot chuck[4] |
| Ampere rating | — | 15 A[4] |
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