Comparison ledger
KLA 1007, Micromanipulator Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | WaferMicromanipulator |
|---|---|---|
| OEM | KLA | Micromanipulator |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | Micromanipulator Wafer |
| Specifications | ||
| Manufacturer | KLA[1] | — |
| Model | 1007[1] | — |
| Description | Wafer Prober[1] | — |
| Wafer size | 150 mm[1] | — |
| Convertible to 8 inch wafer size | Yes[1] | — |
| Vintage | 01.06.1995[1] | — |
| Make | KLA[2] | — |
| Equipment type | Prober[2] | — |
| Configuration | — | with New Wave LCSII 532 System[3] |
| Wafer size range | — | 150 mm (6 inch) to 300 mm (12 inch)[4] |
| Type | — | Manual probe station[4] |
| Low Current/Low Noise | — | Ready[4] |
| Chuck | — | Kelvin chuck wiring[4] |
| Thermal chuck | — | Integrated wiring and plumbing[4] |
| Base | — | Vibration dampened[4] |
| Platen | — | Large area magnetic stainless steel[4] |
| Microscope bridge | — | Heavy duty, motorized drive, 8-inch focus block[4] |
| Control | — | Front panel MicroTouch knobs, automatic functions keypad, optional joystick/remote pendant[4] |
| Upgradeable to | — | Semi-Automatic 9920[4] |
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