Waferpedia

Comparison ledger

1007versusD 8 B Vacuum

KLA 1007, Leybold D 8 B Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1007KLA
OEMKLALeybold
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1007Leybold D 8 B Vacuum
Cited variants—
Specifications
ManufacturerKLA[2]—
Model1007[2]D 8 B[4]
DescriptionWafer Prober[2]—
Wafer size150 mm[2]—
Convertible to 8 inch wafer sizeYes[2]—
Vintage01.06.1995[2]—
MakeKLA[3]—
Equipment typeProber[3]—
Configuration—115/230V[4]
Volume Flow Rate—8 m3/h[5]
OEM—Leybold[4]
Type—TRIVAC-B oil-sealed rotary vane pump[1]
Stage configuration—Dual-stage[1]
Nominal pumping speed—8 m3/h[1]
Connections—DN 16 KF[1]
Oil grades stated—N 62, HE-200, Arctic oil SHC 224[1]
Motor variants stated—Single-phase AC and three-phase AC[1]
Operating temperature range—12 to 40 °C[1]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]idealvac.comidealvac.com
  2. [2]fabsurplus.comfabsurplus.com
  3. [3]Equipment inventory listing
  4. [4]inventory listing
  5. [5]inventory listing