Comparison ledger
KLA 1.112 PSL Wafer, Leica DM8000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | DM8000Leica | |
|---|---|---|
| OEM | KLA | Leica |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Leica DM8000 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Description | — | New generation optical inspection system with digital camera[3] |
| Imaging modes | — | Bright Field (BF), Dark Field (DF), and Differential Interference Contrast (DIC)[3] |
| Controls | — | Controls by GUI[3] |
| Software | — | Leica LAS X[3] |
| Functions | — | Measurements, overlay annotations, and saving as projects[3] |
| Objective setting mentioned | — | Select objective No. 1 (5x)[3] |
| Optical system | — | Leica HC optics (optical system corrected to infinity)[4] |
| Viewing tube | — | Trinocular Ergotube with upright and unreversed image; beam splitting 100/0 and 0/100 (eyepiece/camera)[4] |
| Macro imaging field of view | — | Up to 40 mm scan field on sample[4] |
| Illumination | — | Full LED incident light illumination; viewing techniques: Brightfield, darkfield, DIC, qualitative POL, oblique illumination, UV, OUV. Also full LED transmitted light illumination; BF, POL.[4] |
| Objective nosepiece | — | Motorized, 6-position for BD objectives with M32 thread, absolutely encoded[5] |
| Stage (manual) | — | 8-inch manual inspection stage; travel range 202 mm × 202 mm in reflected and transmitted light; integrated rapid adjustment[4] |
| Stage (motorized) | — | 8-inch scanning stage; travel range 200 mm × 200 mm in reflected and transmitted light; 4 mm pitch spindle; max speed 240 mm/s[5] |
| Focus | — | Manual: heavy-duty 2-stage, coarse and fine, 35 mm travel range, height-adjustable knobs. Motorized: 2-stage with 35 mm travel range, high reproducibility, parfocality compensation.[4] |
| Weight (fully equipped) | — | Approx. 41 kg (microscope approx. 36.1 kg)[4] |
| Power supply | — | 100–120/220–240 V AC, 50/60 Hz[4] |
| Ambient temperature range | — | 15–35 °C (without IR illumination); 15–28 °C (with IR illumination)[5] |
| Relative humidity | — | Max. 80% at temperatures up to 33 °C (without condensation)[4] |
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