Comparison ledger
KLA 1.112 PSL Wafer, KLA 2132, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 2132KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | KLA 2132 |
| Specifications | ||
| Configuration | NIST Traceable[1] | Inspection station; open cassette x2[5] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Product type | — | Wafer inspection system[3] |
| Relationship to KLA 2135 | — | Earlier model than the KLA 2135[3] |
| Wafer size (primary) | — | 200mm (8")[4] |
| Wafer size (alternate) | — | 4", 5", 6" capable[4] |
| Throughput | — | 2–8 wafers per hour[4] |
| Sensitivity | — | >0.25 µm pixels[4] |
| Inspection type | — | Patterned wafer defect inspection[4] |
| Optics | — | Brightfield, small-pixel, high data rate digital image processing[3] |
| User interface | — | DOS operating system[5] |
| SAT capability | — | Segmented Auto Threshold (SAT) included[4] |
| Calibration wafer | — | 8" DSW calibration wafer included[4] |
| Vintage (year of introduction) | — | 1995[4] |
| Vintage | — | 1995[4] |
| Primary wafer size | — | 200 mm (8 in)[4] |
| Capable wafer sizes | — | 100 mm (4 in), 125 mm (5 in), 150 mm (6 in)[4] |
| Segmented Auto Threshold (SAT) | — | Included[4] |
| Optics / imaging | — | Brightfield, small-pixel, high-data-rate digital image processing[3] |
| SAT option | — | Included in some configurations; excluded in one listed configuration[5] |
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