Comparison ledger
KLA 1.112 PSL Wafer, KLA 200, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | KLA 200 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Supported equipment family | — | KLA 200 series pattern inspection stations[3] |
| Related supported equipment | — | KLA Tencor 300 Series Pattern Inspection Stations, STARlight tools, and URSA tools[3] |
| Data hub function | — | 9X Fileservers are central data hubs serving KLA Tencor reticle inspection equipment[3] |
| Software function | — | 9X System Software supports storage and retrieval of setup and result files and several analysis functions[3] |
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