Waferpedia

Comparison ledger

0035235-003 MMD HeadversusDM8000

KLA 0035235-003 MMD Head, Leica DM8000, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
DM8000Leica
OEMKLALeica
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 0035235-003 MMD HeadLeica DM8000
Specifications
ConfigurationTSTD PCB ASSY, MMD MEAS HEAD[1]—
Model0035235-003[1]—
MakeKLA[1]—
Part DescriptionTSTD PCB ASSY, MMD MEAS HEAD[1]—
Compatible SystemKLA AIT-XP[1]—
Description—New generation optical inspection system with digital camera[2]
Imaging modes—Bright Field (BF), Dark Field (DF), and Differential Interference Contrast (DIC)[2]
Controls—Controls by GUI[2]
Software—Leica LAS X[2]
Functions—Measurements, overlay annotations, and saving as projects[2]
Objective setting mentioned—Select objective No. 1 (5x)[2]
Optical system—Leica HC optics (optical system corrected to infinity)[3]
Viewing tube—Trinocular Ergotube with upright and unreversed image; beam splitting 100/0 and 0/100 (eyepiece/camera)[3]
Macro imaging field of view—Up to 40 mm scan field on sample[3]
Illumination—Full LED incident light illumination; viewing techniques: Brightfield, darkfield, DIC, qualitative POL, oblique illumination, UV, OUV. Also full LED transmitted light illumination; BF, POL.[3]
Objective nosepiece—Motorized, 6-position for BD objectives with M32 thread, absolutely encoded[4]
Stage (manual)—8-inch manual inspection stage; travel range 202 mm × 202 mm in reflected and transmitted light; integrated rapid adjustment[3]
Stage (motorized)—8-inch scanning stage; travel range 200 mm × 200 mm in reflected and transmitted light; 4 mm pitch spindle; max speed 240 mm/s[4]
Focus—Manual: heavy-duty 2-stage, coarse and fine, 35 mm travel range, height-adjustable knobs. Motorized: 2-stage with 35 mm travel range, high reproducibility, parfocality compensation.[3]
Weight (fully equipped)—Approx. 41 kg (microscope approx. 36.1 kg)[3]
Power supply—100–120/220–240 V AC, 50/60 Hz[3]
Ambient temperature range—15–35 °C (without IR illumination); 15–28 °C (with IR illumination)[4]
Relative humidity—Max. 80% at temperatures up to 33 °C (without condensation)[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]epfl.chepfl.ch
  3. [3]downloads.leica-microsystems.comdownloads.leica-microsystems.com
  4. [4]opti-tech.caopti-tech.ca