Waferpedia

Comparison ledger

0035235-003 MMD HeadversusAIT UV Darkfield

KLA 0035235-003 MMD Head, KLA AIT UV Darkfield, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 0035235-003 MMD HeadKLA AIT
Specifications
ConfigurationTSTD PCB ASSY, MMD MEAS HEAD[1]Pillar[2]
Model0035235-003[1]—
MakeKLA[1]—
Part DescriptionTSTD PCB ASSY, MMD MEAS HEAD[1]—
Compatible SystemKLA AIT-XP[1]—
Software Version—6.3.24.3[2]
CIM—SECS / GEM[2]
Factory System—FOUPS[2]
Handler System—Robot[2]
Missing Parts—Incomplete Wafer Handler Module & Inspection Module[2]
Vintage—2005[2]
Wafer Size—12 inch[4]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]Equipment inventory listing