Comparison ledger
JEOL JEM-100B, KLA 1.112 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | JEM-100BJEOL | |
|---|---|---|
| OEM | JEOL | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | JEOL JEM-100B | KLA 1.112 PSL Wafer |
| Specifications | ||
| OEM | JEOL[1] | — |
| Model | JEM-100B[1] | — |
| Equipment type | electron microscope[1] | — |
| Integrated features | electromagnetic deflection unit; electromagnetic stigmator[1] | — |
| Instrument type | Transmission electron microscope[1] | — |
| Special features | Electromagnetic deflection unit and electromagnetic stigmator[1] | — |
| Configuration | — | NIST Traceable[2] |
| Wafer Size | — | 8 inch[2] |
| NIST Traceable | — | True[2] |
| Compatible Tools | — | Surfscan 6xy0 and Sp1[3] |
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