Comparison ledger
J.A. Woollam RC2, Melles Griot 05 LHP 151, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | RC2J.A. Woollam | 05 LHP 151Melles Griot |
|---|---|---|
| OEM | J.A. Woollam | Melles Griot |
| Category | Precision Optics | Precision Optics |
| Wafer size | 200mm | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | J.A. Woollam RC2 | Melles Griot 05 |
| Specifications | ||
| Instrument type | Spectroscopic ellipsometer[1] | — |
| Measured quantities | Thicknesses and refractive indices of thin films[1] | — |
| Substrate size | Up to 200 mm wafers; chips with a surface larger than the cross section of the incident beam[1] | — |
| Light source | Xenon Arc lamp 75W[1] | — |
| Wavelength range | 210 nm to 2500 nm[1] | — |
| Spot size without focusing probes | 3 to 4 mm beam diameter[1] | — |
| Spot size with focusing probes | 120 microns beam diameter[1] | — |
| Stage | Motorized XY stage mapping[1] | — |
| Vertical motion | Motorized Z and autofocus[1] | — |
| Alignment | Automatic tilt alignment[1] | — |
| Software | CompleteEASE[1] | — |
| Equipment type | Spectroscopic ellipsometer[1] | Laser[2] |
| Measurement capability | Measures thicknesses and refractive indices of thin films (transparent or not)[1] | — |
| Measureable material classes | Dielectric and semiconductor films (silicon dioxide, silicon nitride, polysilicon, amorphous silicon); metallic films; organic layers such as carbon and photosensitive resists[1] | — |
| Measurement principle | Measures the ratio of reflection coefficients Rp/Rs expressed as Ψ and Δ; refractive index (n) and thickness (t) are resolved by an algorithm from measured Ψ and Δ values[1] | — |
| Configuration | — | With 05 LPL 340 Power Supply (Does not power on)[2] |
| Make | — | Melles Griot[2] |
| Model | — | 05 LHP 151[2] |
| Power state | — | Does not power on[2] |
Plan your fab
Building a Precision Optics process? Get a complete equipment list.
Open the fab equipment planner →