Comparison ledger
Hitachi SU 8010, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SU 8010Hitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi SU | KLA .204 PSL Wafer |
| Specifications | ||
| Configuration | No PC[1] | NIST Traceable[5] |
| Type | Scanning electron microscope (SEM)[2] | — |
| Source | Cold field emission (CFE)[2] | — |
| Operating voltage range | 100 V to 30 kV[2] | — |
| Resolution | 1.3 nm at 1 kV[2] | — |
| Maximum magnification | 100kx[2] | — |
| Sample size | 50 mm diameter x 50 mm diameter[4] | — |
| EDS | Yes; EDS (Be 4 ~ U 92)[4] | — |
| Wafer Size | — | 8 inch[5] |
| Traceability | — | NIST[6] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[5] |
| NIST Traceable | — | Yes[5] |
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