Comparison ledger
Hitachi S 9380 II CD-SEM, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S 9380 II CD-SEMHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi S 9380 | KLA .204 PSL Wafer |
| Specifications | ||
| Configuration | 12" E3 Port / 8" OCL2300 Port[1] | NIST Traceable[3] |
| No of FOUR port | 3[2] | — |
| Software Version | 26.23[2] | — |
| Turbo Pump | Leybold/ TMP 340 ML /3[2] | — |
| Chiller | Hitachi / W-5010 T[2] | — |
| Power Supply Unit | PS Unit (569-6546)[2] | — |
| Type | Critical Dimension Scanning Electron Microscope (CD-SEM)[1] | — |
| Port configuration | 12" E3 Port / 8" OCL2300 Port[1] | — |
| Number of ports | 3[2] | — |
| Power phase | Single Phase[2] | — |
| Vintage (example unit 1) | 2005[1] | — |
| Vintage (example unit 2) | 2008[2] | — |
| Wafer Size | — | 8 inch[3] |
| Traceability | — | NIST[4] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[3] |
| NIST Traceable | — | Yes[3] |
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